3Yes 1No

1DSP platform 1MEMS electrostatic drive 1MEMS fabrication processes 1actuator force 1amplifiers 1atomic force microscopes 1closed-loop bandwidth 1damping control 1damping performance 1displacement-to-digital converter 1electrostatic transduction 1feedback control 1integral controller 1nanopositioning system design 1nanotechnology 1open loop performance 1position sensitive detectors 1resolution 1resonance frequency

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2Fleming, Andrew J. 1Kenton, B. J. 1Leang, K. K. 1Moheimani, S. O. R. 1Moheimani, S. O. Reza 1Moore, Steven Ian 1Yong, Y. K.

2conference paper 2journal article

22012 12010 12016

3Adobe Acrobat PDF